JPH0263443A - 超音波探触子の製造方法 - Google Patents
超音波探触子の製造方法Info
- Publication number
- JPH0263443A JPH0263443A JP1151495A JP15149589A JPH0263443A JP H0263443 A JPH0263443 A JP H0263443A JP 1151495 A JP1151495 A JP 1151495A JP 15149589 A JP15149589 A JP 15149589A JP H0263443 A JPH0263443 A JP H0263443A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- electrode
- vibrator plate
- matrix
- filler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000000945 filler Substances 0.000 claims abstract description 14
- 239000000523 sample Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 14
- 239000011159 matrix material Substances 0.000 abstract description 5
- 238000004090 dissolution Methods 0.000 abstract 1
- 230000006698 induction Effects 0.000 abstract 1
- 238000002604 ultrasonography Methods 0.000 description 10
- 239000000758 substrate Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 239000012777 electrically insulating material Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1151495A JPH0263443A (ja) | 1989-06-13 | 1989-06-13 | 超音波探触子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1151495A JPH0263443A (ja) | 1989-06-13 | 1989-06-13 | 超音波探触子の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57066702A Division JPS58183152A (ja) | 1982-04-20 | 1982-04-20 | 超音波探触子およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0263443A true JPH0263443A (ja) | 1990-03-02 |
| JPH0532059B2 JPH0532059B2 (en]) | 1993-05-14 |
Family
ID=15519750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1151495A Granted JPH0263443A (ja) | 1989-06-13 | 1989-06-13 | 超音波探触子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0263443A (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6396198B1 (en) | 1999-06-16 | 2002-05-28 | Ngk Spark Plug Co. Ltd. | Wave transmission-reception element for use in ultrasound probe, method for manufacturing the wave transmission-reception element and ultrasound probe incorporating the transmission-reception element |
| US10654071B2 (en) | 2016-03-07 | 2020-05-19 | Seiko Epson Corporation | Ultrasonic element array, ultrasonic probe, ultrasonic apparatus, and manufacturing method for ultrasonic element array |
-
1989
- 1989-06-13 JP JP1151495A patent/JPH0263443A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6396198B1 (en) | 1999-06-16 | 2002-05-28 | Ngk Spark Plug Co. Ltd. | Wave transmission-reception element for use in ultrasound probe, method for manufacturing the wave transmission-reception element and ultrasound probe incorporating the transmission-reception element |
| US10654071B2 (en) | 2016-03-07 | 2020-05-19 | Seiko Epson Corporation | Ultrasonic element array, ultrasonic probe, ultrasonic apparatus, and manufacturing method for ultrasonic element array |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0532059B2 (en]) | 1993-05-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7316059B2 (en) | Method of manufacturing an ultrasonic probe | |
| US20030085635A1 (en) | Multidimensional ultrasonic transducer arrays | |
| JPH0549288B2 (en]) | ||
| JP2009061112A (ja) | 超音波探触子および超音波撮像装置 | |
| JP3288815B2 (ja) | ２次元アレイ超音波プローブ | |
| CN110026329A (zh) | 超声换能器及其制备方法 | |
| JPS5920240B2 (ja) | 超音波探触子及び該超音波探触子の製造方法 | |
| JPH11299779A (ja) | 超音波探触子及びその製造方法並びにその超音波探触子を用いた超音波診断装置 | |
| Bureau et al. | A two-dimensional transducer array for real-time 3D medical ultrasound imaging | |
| JP5657950B2 (ja) | 超音波探触子の製造方法 | |
| JPH0263443A (ja) | 超音波探触子の製造方法 | |
| JPH0448454B2 (en]) | ||
| JP4426513B2 (ja) | 超音波探触子及びその製造方法 | |
| JP3376139B2 (ja) | 超音波トランスジューサとその製造方法 | |
| JP4304112B2 (ja) | 超音波探触子の製造方法 | |
| JP3930118B2 (ja) | 圧電素子及びその製造方法 | |
| JP3392985B2 (ja) | マトリクス状超音波探触子 | |
| JP2005277864A (ja) | 超音波探触子及び超音波探触子の製造方法 | |
| JP3354195B2 (ja) | 超音波プローブ装置 | |
| JPH07131896A (ja) | 超音波プローブ及びその製造方法 | |
| JPH10117399A (ja) | 超音波トランスジューサー及びその製造方法 | |
| JPH054397Y2 (en]) | ||
| JPS61253999A (ja) | 超音波振動子 | |
| JP2936007B2 (ja) | 超音波探触子 | |
| JP2000214144A (ja) | ２次元配列型超音波探触子 |